Festo VTOC Valve Terminal Can Control up to 96 Control Points in Semiconductor Fabrication
June 3, 2026
Festo VTOC Valve Terminal Can Control up to 96 Control Points in Semiconductor Fabrication
As semiconductor gas box designs incorporate more process lines and control points, the number of pilot valves required to manage critical gases increases. Typical valve terminals with limited capacity force OEMs to use multiple units, increasing panel space, wiring complexity, build time, and system cost.
Festo now offers the VTOC valve terminal in a format configurable for high-density semiconductor applications. This special variant features 48 valve stations – twice the standard VTOC capacity – within a single compact footprint unit. Each valve slice controls two processes, enabling up to 96 process control points per unit.
Rather than extending the terminal lengthwise to increase valve count, Festo redesigned the VTOC terminal to integrate two compact rows of valves, allowing the terminal to deliver higher control capacity while maintaining a compact form factor ideal for conserving control panel space.
The VTOC uses swappable interface modules to support Ethernet/IP, PROFIBUS, EtherCAT, Modbus TCP, and CC-Link, allowing the same valve terminal to be used across control environments. This design supports consistency across builds, reduces engineering overhead, lowers inventory, and promotes efficiency through familiarity with a standard component.
With each valve rated for up to 40 million operations, the VTOC delivers a long service life in high-duty environments. The modular valve design enables fast identification and replacement of individual valves, reducing maintenance time and minimizing disruption to critical processes.
For more information on the VTOC valve terminal for gas box applications, contact a Festo sales representative or an authorized distributor and visit the Festo semiconductor industry page for the company’s range of solutions.
About Festo
Festo, the world’s leading supplier of automation technology and technical education, is deploying its products and services to meet the challenges of digitalization and smart production. Founded in 1925, the family-owned company based in Esslingen, Germany, supports a wide range of needs for advanced solutions in factory and process automation. In Canada, Festo has been supporting Canadian industry for 50 years, continuously elevating the state of manufacturing in this country with innovative products, optimized motion control solutions and unrivalled support.
Globally, some 300,000 customers put their trust in the company’s pneumatic and electric drive products and technology. In addition, Festo Didactic provides state-of-the-art training equipment and educational programs for industrial companies and educational institutions – about 56,000 customers worldwide. The Festo Group registered sales of €3.33 billion in the 2025 financial year and is represented worldwide at 250 locations with over 20,600 employees. About 8% of its annual turnover is invested in research and development.
More Information
To learn more about Festo’s automation solutions, engineering tools, and services, visit www.festo.com.
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